JPS5549773B2 - - Google Patents
Info
- Publication number
- JPS5549773B2 JPS5549773B2 JP15919076A JP15919076A JPS5549773B2 JP S5549773 B2 JPS5549773 B2 JP S5549773B2 JP 15919076 A JP15919076 A JP 15919076A JP 15919076 A JP15919076 A JP 15919076A JP S5549773 B2 JPS5549773 B2 JP S5549773B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Element Separation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15919076A JPS5383483A (en) | 1976-12-28 | 1976-12-28 | Production of semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15919076A JPS5383483A (en) | 1976-12-28 | 1976-12-28 | Production of semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5383483A JPS5383483A (en) | 1978-07-22 |
| JPS5549773B2 true JPS5549773B2 (en]) | 1980-12-13 |
Family
ID=15688267
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15919076A Granted JPS5383483A (en) | 1976-12-28 | 1976-12-28 | Production of semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5383483A (en]) |
-
1976
- 1976-12-28 JP JP15919076A patent/JPS5383483A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5383483A (en) | 1978-07-22 |